|
TEL: 021-63811212
|
|
KRI Kaufman & Robinson. Inc/ U.S.A
|
|
|
Ion Source
|
|
|
Kaufman & Robinson Inc. Locates at Denver. KRI develop and sell many kinds of Ion Source for a long time. The KRI products are used in vacuum processes to deposit stable thin films, etch precision nanostructures and modify surface properties. Our products are common tools used in the a number of material process applications.
|
|
-
Ion Milling /etching (IBE)
|
-
Ion Beam Sputter Deposition(IBSD)
|
-
Ion Beam Assisted Deposition (IBAD)
|
-
Surface polishing or smoothing
|
-
Surface modification and texturing
|
|
Product Lineup：
|
|
|
End Hall Ion Source Series Gridless Ion Source
*eH200 *eH400 *eH1000 *eH2000 *eH3000
|
|
RFICP Series RF Gridded Ion Source
*RFICP40 *RFICP100 *RFICP140 *RFICP200 *RFICP300
|
|
KDC Series Kaufman Gridded Ion Source
*KDC10 *KDC40 *KDC75 *KDC100 *KDC160
|
|
